施耐德BMXFCW301

施耐德BMXFCW301

BMXFCW301

BMXFCW301 在控制系统的一个工作周期中，各依次顺序相连的工作阶段，称为步或工步，用矩形框和文字(或数字)表示。步有两种状态：“活动步、“非活动步” 、“初始步”：一系列活动步决定控制过程的状态。对应控制过程开始阶段的步，每一个功能表图至少有一个初始步，初始步用双线矩形框表示。

Kokusai Vertron 3 VDF LPCVD

KLA 2131 

Varian E1000 

Plasma-Therm Industrial Products Core Interface

Materials Research Corporation Eclipse Star Parts Tool

LAM Research AC Distribution Unit 685-029442-140 

Ultrapointe 1300R 

CFM Water Purification System Full Flow 4/97

AMAT Centura Mainframe

LAM OnTrak DSS-200

Therma-Wave Opti-Probe 2600B

Varian E1000 

Tokyo Electron ACT 12 

Nova NovaScan 3060 0190-00492

Nova NovaScan 3030 0190-00563

KLA-Tencor Prometrix FT-750 

Semitool Wet Solvent Stripper WST308A 

Coherent ExciStar S Laser 1127985  0190-B0150

LAM Rittal Corp. AC Distribution Unit ES5984 

Rudolph MetaPulse XCu 200mm Metrology Tool

KLA-Tencor CRS 3000 

Tokyo Electron ACT 12 Process 

Nikon Card Cage Assy. APGCi 7500 RS013-497

Verteq 1800 SRD Tool 1800.6 1800-6AR

CTI-Cryogenics High Capacity Compressor 0190-07137

Edwards STP-A2503PV TurboPump B752-01-01 3620-00007

TEL ACT 12 Wafer Edge Exposure 

Nova NovaScan 420 MU Scanner 0190-77203

Tokyo Electron ACT 8 AC Power Box PB1-U125-01-T

Tokyo Electron ACT 8 SOG AC Power Box PB1-U100-WA-DT

Rudolph Technologies MetaPulse 200 

Tokyo Electron ACT 12 

MicroVision 200mm Wafer Sorter MVT 7080 

Genus Mainframe 7000

Tokyo Electron ACT 12

LAM OnTrak Synergy Integra Wafer Scrubber Parts System

TEL ACT 12 Coat

Schlumberger ITS9000FX

KLA Interface 300DFF1P 9700-9129-01

KLA Interface 300DFF1P 9700-9129-01

Alcatel Helium Leak Detector 180 

Alcatel Adixen ASM 180TD

ENI Spectrum B-10513  0190-17877

ENI Spectrum RF Generator B-10513 0190-17877

TEL ACT  CT2980-415508-W1

AMAT Quantum Heat Exchanger 0240-61428 

Tokyo Electron TEL ACT 12 AC Power Box PB122-U300-02W

Edwards Vacuum Turbopump STP-XH2603P 3620-00368

TEL ACT 8 SOG AC Power Box PB1-U100-WA-DT

MKS RPG-50Z  0920-00133

Rorze Robot RR721L202H-H30-1CA 0190-01152

SMC Thermo-Con INR-244-244U-670

AE Ovation  3150861-002 0190-27049

Kensington 200mm Wafer Sorter Mapping Station CSMT-4

Takatori ATRM-2100 

ENI Nova  50A-01M5

Tokyo Electron ACT  PB1-U125-01-T

TEL ACT 12 Coat 

Kawasaki Wafer Robot 3NS410B-D501 0190-24909

ATS M-Pak Temp. Control Chiller System MP40F-DI

Kobelco Leo LTA-1200