2711P-K4C5D

2711P-K4C5D

2711P-K4C5D 有向连线将各步按进展的先后顺序连接起来，它将步连接到转换，并将转换连接到步。有向连线指定了从初始步开始向活动步进展的方向与路线。有向连线可垂直或水平布置。为了使图面更加清晰，个别情况下也叫用斜线。在功能表图中，进展的走向总是从上至下、从左至右，因此有向连线的箭头可以省略。如果不遵守上述进展规则，加注箭头。若垂直有向连线与水平有向连线之间没有内在联系，允许它们交叉，但当有向连线与同一进展相关时，则不允许交叉。在绘制功能表图时，因图较复杂或用几张图表示有向连线中断，应注明下一步编号及其所在的页数。

2711P-K4C5D 

AE E'Wave DC Power Supply 3152603-014D 0190-23269

AE Pinnacle 20kW DC Supply 3152412-149A 0190-08124

AE Pinnacle 10kW 6kW DC Supply 3152412-214 0190-14126

Yaskawa Dual Arm Trnsfr Robot XU-RCM7220  0190-25393

ENI OEM-2000 Rev.B RF Generator 2000W 

KLA-Tencor AIT 2 Optics Module 0099610-000

TDK TEL ACT 12 DC Backup Module MSE181D

ENI Spectrum RF Generator B-5002  0190-15320

AE RFPP RF25M RF Generator 3150048-000 

AE RF25M 2500W RF Generator 3150048-004B 

ENI Spectrum B-5002 RF Generator 0190-15320

ENI OEM-12B3 3 Phase RF Generator  0190-76006

Hitachi DC Power Generator 3-821755-2

TEL ACT 8 Adhesion Process Station 811

Advanced Energy Ovation 2760 RF Generator 3150292-007

AE Apex 5513 

AE Apex 5513  0190-11209

Edwards iQDP80  QMB250 

Asyst SMIF-300FL 

Edwards iQDP40 Dry Vacuum Pump QMB250

AE RF Match Network 3155031-021A 

MECS Wafer Handling Robot UTM-3500 

Seiko Seiki Turbomolecular STP SCU-H1000C

AE PDX 900-2V RF Generator 3156024-110A

AE PDX 900-2V 3156024-110C 

Despatch Tool Conditioning Oven SNB2-24-S

AE VHF 2060 RF Generator 3150852-005A

Asyst Transfer Robot UTX-F5500-16

AE Apex 3513 0920-00005

AE HFV 8000 5kW RF Generator 3155083-109B

Ebara A10S 

AE HFV 8000 RF Generator 3155083-111A

TEL P-8 Wafer Prober 200mm Dual Arm Robot & Controller

Kawasaki Robot Slave Controller 30C61C-B002 0190-12377

Kawasaki Master Robot Controller 30C61D-B001 0190-12378

Yaskawa Robot Controller XU-CN1112A working 0190-10288

Yaskawa Prealigner 300 mm XU-ACP4801 0190-05652

ENI DCG-200 DCG-200E 

Brooks PRI Wafer Robot WTM-511-2-FWS02-V1

AE Pinnacle 6kW DC Power Supply 3152412-218E 

Brooks PRI Robot WTM-511-2-FWS02-V1-CU 

Brooks Fixload Load Port Fixload 25

ENI Genesis GMW-50 3kW RF Generator 0190-13202

ENI Genesis GHW-12Z RF Generator 0190-25527

TEL ACT 8 SOG Absolute Filter CT2980-090863-11 

TEL ACT 8 FFU Fan Filter Unit CT2980-091974-11

TEL ACT 8 FFU Fan Filter Unit CT2980-090796-11

AE Pinnacle 6kW DC Power Supply 3152412-218G 

SMC Heat Exchanger INR-498-P002 

AE Apex 5513 0190-11209

AE Apex 3013 RF Generator 3kW 0920-00049

TEL ACT 12 IRA Driver Assy CT2987-416031-W4

TEL ACT 8 IRA Driver Assy CT2987-406077-15 

AE Apex 3013 RF Generator 3kW 0190-11208

AE Apex 3013 RF Generator 3kW 0190-09837

AE Apex 3013 RF Generator 3kW 0190-11208

AE Apex 3513 3.5kW RF Generator 0920-00051

AE HFV 8000 8kW RF Generator 3155083-192 0190-15553

AE Pinnacle 6kW 10kW DC Supply 3152412-116 0190-13866

AE Ovation VHF 2760 RF Generator 3150292-005 0190-14887

AE Apex 3013 RF Generator 3kW working 0190-09837

SMC HE Control Unit Assy INR-498-P004 0190-18420