2711P-K6C5D

2711P-K6C5D

2711P-K6C5D

Ａ、将万用表拨至Ｒ×±挡，按照中周变压器的各绕组引脚排列规律，逐一检查各绕组的通断情况，进而判断其是否正常。

Ｂ、检测绝缘性能钹

将万用表置于Ｒ口１０Ｋ挡，做如下几种状态测试：

（１）初级绕组与次级绕纬间的电阻值；

（２）初级绕组与外壳之间的电阻值；

（３）次级绕阻与外壳之间的电阻值。

2711P-K6C5D 

Pentagon Tech. Novellus Stage Shield 16-126664-01,

10-299767-00 Novellus,

NOVELLUS RF MATCH MATCHING NETWORK 02-165991-00,

Novellus Fluidic feed Thru P/N A17-319-01 ,

NOVELLUS RING, GUAR, EXT CATHO, LTM, C3SPD 15-280354-00,

NOVELLUS NICKEL SPINDLE SHAFT,

BOC Edwards Novellus Process Interface Module U20000617,

Novellus 02-276537 ,

MFC Brooks 5866 N2,

02-107939-00 Novellus,

Novellus Shield Assembly 16-117982-00 ,