电机MPM-B1651C-MJ72AA

MPM-B1651C-MJ72AA

反向启动：

1、合上空气开关QF接通三相电源。

2、按下反向启动按钮SB2，KM2通电吸合并通过辅助触点自锁，常开主触头闭合换接了电动机三相的电源相序，这时电动机的相序是L3、L2、L1，即反向运行。

Nikon 4S587-666 Linear Motor Controller CLSR-4590-N2CG 

Oerlikon P1264 Stroke Cylinder 102078752 

ENI Spectrum B-5002 RF Generator 0190-15320 working

Matrix Ind Chem Bath/Fume Hood I98BD/H-ASSY + Aquasonic

ENI DCG-200 DC Power Supply Slave DCG-200Z 0190-07969

Nova NovaScan 840 210-48000-01  0650-01111

Nova NovaScan 420 210-48000-01  0650-01111

Nova NovaScan 420 210-48000-01  0650-01111

Hitachi 3-845612 Kyoto Denkiki KDS-20170S Power Supply

Hitachi DC Power Generator 3-821755-2 

AE AZX63 Automatch RF Match 3155031-023A refurb

Lam 200mm Chamber 853-073087-600-A-262 working

Asyst Reticle SMIF Indexer R150  9700-4314-01 Rev.E

Asyst Reticle SMIF Indexer R150 9700-4314-01 

Varian TV 300HT Vacuum Turbopump 9699037S008 

Leybold Inficon Gas Analyzer Transpector CIS 2 untested

Nikon SPA431B Linear Motor Controller 4S587-241 

MicroVision 200mm Wafer Sorter MVT 7080 Sorter working

Varian TV 250 Vacuum Turbopump 9699007S024 refurbished

ENI DCG-200E DC Power Supply Slave 0190-22935 

AMAT XR80 Implanter Gas Interface 0090-91890ITL

ASML Twinscan BP Mirror 193NM 4022.454.9932.2 

Seiko Seiki Vacuum Turbopump STP-301 

Lucas Labs CAT Process Chamber Assurance Tool

AMAT XR80 Implanter Gas Interface 0090-91819 ITL

Nicolet ECO 1000S Metrology Tool untested

AMAT XR80 Implanter Gas Interface 0090-91890 ITL

AE Apex 5513 RF Generator 5.5kW working

Hitachi Transfer Clean Robot CR-712V working

Leybold Vacuum Turbopump Turbovac 1000 C working

Lam OnTrak DSS200 Wafer Scrub Input Station 12-8892-084

Nikon Optistation 3 Wafer Loader Assembly

AE Apex 5513 RF Generator 5.5kW 0190-11209 working

ENI OEM-12B3 3 Phase RF Generator 1250W  0190-76006

Leybold Coolvac 1500 SemiLine Cryopump working

Electroglas Horizon 4085X Wafer Prober 200mm untested 

Genmark Precision Automated Transfer Robot working

Edwards iQDP80 Vacuum Pump QMB250 Blower, Needs Rebuild

MRC 200mm Eclipse Magnet Assy. A120364 

Hitachi M-308ATE PCB Cage System Controller Module

Yashibi YCC-18K-X DC Pwr Supply 5kV 500mA Hitachi M-308

AMAT XR80 Implanter Gas Interface 9090-00106 ITL

ENI DCG-200Z DC Plasma Generator 10kW DCG-200 working

Raymond Pacer 60C40TT Stand Up Fork Lift 4000# 183" 36V

ENI DCG-200Z DC Plasma Gen. 10kW working 0190-07959

Asyst SMIF-300FL Load Port 300FL,S2.1 HAMA/E-84

Alcatel Vacuum Turbopump 5401 

Edwards iQDP80 QMB250 Dry Vacuum Pump working

Edwards iQDP40 Dry Vacuum Pump QMB250 Blower as-is

Neslab DI Max DEI Water to Water Chiller

Nikon SPA236A Linear Motor Controller 4S586-947-2 

Nikon SPA432B Linear Motor Controller 4S586-950-4 

Nikon SPA432A Linear Motor Controller 4S586-949-4 

SMC Thermo Chiller INR-497-032 working

AE RF Match Network 3155031-021A AMAT 0190-01402

AMAT Quantum Leap III Ion Source IHC 0040-50527

Thermo Neslab DI Max Water To Water Chiller 0190-06335

AE Navigator RF Match 3155169-001D 0190-15007 working

Kawasaki CCD Prealigner 3NS003S-C201 working 0190-17388

ChemWest Automated Slurry Filter Cabinet 420518 working

Ebara ET300WS-A Vacuum Turbopump 3620-01449 rebuilt

Ebara ET300WS Vacuum Turbopump 3620-01449 rebuilt

AMAT Local RF Match 0010-08323 Rev.007 working

AMAT Top Local RF Match 0010-08322 Rev.002 working

AMAT Top Local RF Match 0010-08322 Rev.007 working

AMAT Top Local RF Match 0010-08322 Rev.003 working

Trazar Corp. RF Match AMU10H-1 working

Varian Plasma Flood & Bias Supply E11020501 working

Kawasaki Robot Controller C62C-A002 working

MECS Wafer Handling Robot UTM-3500 with Controller

AE PDX 900-2V RF Generator 3156024-110A working 900W

AE PDX 900-2V RF Generator 3156024-110B working 900W

AE PDX 900-2V 3156024-110C RF Generator 0190-75075

AMAT Top Local Match 300mm Ultima 0010-08322 working

Seiko Seiki Turbopump Controller SCU-H1000C STP-H1000C

Seiko Seiki Turbopump Controller SCU-H1000C STP-H1000C

Hitachi 3-833535-1 Pearl Kogyo RF Generator RP-300 Rfrb

Despatch Tool Conditioning Oven SNB2-24-S working

Genmark Automation Robot Controller S08R v.11 working

Genmark Robot Controller SMALL 990010622A1 working

Equipe PRI Transfer Robot ABM-407B-1-S-CE-S293 working

Genmark Automation Robot Controller S08P4.RD working