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6GK5623-0BA10-2AA3
全闭环允许旋转电机的位置环,通过直接安装在负载上的附加旋转编码器来闭合。这提高了可重复性和准确性,但对提高刚性、稳定时间和磨损没有太大作用。
稳定时间对机器的影响
实际上,机器可能会由于稳定时间性能不佳而浪费钱,在伺服电机选型过程中很少会考虑这一点。在图 14所示的装置中,具有相似功率容量的直接驱动电机和齿轮电机,以相同的运动曲线运行相同的负载。
行星齿轮减速比为 50:1,额定间隙小于5弧分。移动曲线要求两个电机在接近其峰值扭矩额定值时加速和减速,并且 RMS 扭矩刚好低于连续额定值。两台电机都经过调谐,直到电机编码器测量的稳定时间接近 50 毫秒。在两个装置中,外部环形编码器都安装在负载上,以从外部测量负载位置以进行分析。这揭示了由齿轮电机驱动负载中的振荡,否则电机的编码器看不到这些。
KLA Tencor Illumination Control 710-713250-01
KLA Tencor Cassette Controller Board 710-711879-01
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KLA Tencor MMD analog AIT UV 0021488-005 Rev. AA
KLA Tencor MMD analog AIT UV 0052196-007
KLA Tencor MMD analog AIT UV 0021488-004 Rev AA
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KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
JDS Uniphase 2214-30SLQT Laser KLA-Tencor E137025
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KLA-Tencor AIT 2 PSF Driver Board 556661 working
KLA-Tencor AIT 2 4-Channel Motor Control Board 363251
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KLA-Tencor AIT 2 U500 Control Board 690D1470 working
KLA-Tencor Quantox High Voltage Control Module 52-1081
KLA-Tencor 8100 200mm XY Stage 780-10480-001 working
KLA-Tencor CRS1010 Camera Lens Filter 002001
KLA-Tencor CRS1010 Lens Filter Assy. 000056 working
Olympus KLA-Tencor AIT Microscope Turret 0034223-000
Olympus KLA-Tencor AIT Microscope Turret 529737
KLA-Tencor 710-663106-001 Dual Stepper Driver 2 New
KLA-Tencor EDrawer Hardware RETR Kit 5.2 STD 2139
KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000
KLA-Tencor AIT2 Power Assembly LPM 390500
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KLA-Tencor Glentek Electronics Analyzer 0045454-000
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KLA-Tencor Rotary Transfer Arm 720-07360-000
KLA-Tencor XP Objective Lens 0110155-000 Untested
KLA-Tencor Newport AIT3 Mask Changer 556190 New
KLA-Tencor Laser Mod 0124593-000 New
KLA-Tencor AIT UV Laser Servo Detector 0099586-001 New
KLA Tencor PFE 4K Mask SFS7500 ASSY 213780 REV D
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor 710-710112-01 Mechanical Drive Board
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KLA Tencor robot DISTR AIT2 530352 P/N 0035531-000
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Sony KLA-Tencor AIT 2 PowerHAD Camera DXC-950 363170
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KLA-Tencor AIT/UV Laser Servo Detector 0099572-000 New
KLA-Tencor SLX Chirp Cell 760-333918-000
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KLA-Tencor SLX Dog/Wag Assembly 760-333026-001
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