西门子565-210

西门子565-210

565-210在功能表图中，命令(Command)或称动作(Action)用矩形框文字和字母符号表示，与对应步的符号相连。一个步被激活，能导致一个或几个动作或命令，亦即对应活动步的动作被执行。若某步为非活动步，对应的动作返回到该步活动之前的状态。对应活动步的所有动作被执行，活动步的动作可以是动作的开始、继续或结束。若有几个动作与同一步相连，这些动作符号可水平布置，也可垂直布置。

565-210 

Advanced Thermal Sciences Chiller MP40B-GL

Mitsubishi RV-E14NHC-SA06 

AE APEX Generator 0190-15552 

Semitool Wet Solvent Stripper WST308A

Shimadzu Vacuum Turbopump TMP-3203LMC-K1

Coherent Photocoagulation Laser Novus Omni untested

Edwards FSI 1000 1000A-3

ETO 80-S03 RF Generator Rack 0190-40009

TEL ACT 8 Chilling Hot Plate Process Station 

TEL ACT 12 WEE Lamp House CT2985-411701-W3 

TEL ACT 12 Interface Block Robotics Arm 200mm

Yaskawa VS2B Robot SRC-II 005

Yaskawa Transfer Robot Track Rail XU-ACL4722

SMC Thermo-Con INR-244-211T-24

Yaskawa TEL Unity 2 VS2B

Ebara A30W 

Shimadzu Vacuum Turbopump TMP-3403LMC 

SVG Procell Electronics Cabinet

CTI-Cryogenics High Capacity Compressor 0190-27351

Tokyo Electron ACT 12 

Edwards DZR-4800 

ENI Spectrum B-5002  0920-00062

AMAT Quantum Heat Exchanger 0240-61428

Kawasaki Transfer Robot 3NS410B-A004 0190-10300

AE Pinnacle  3152412-245  0190-24674

Yaskawa Transfer Robot Track XU-ACL3701

Yaskawa Transfer Robot 300262-2004 0190-15078

LAM Research LBPM AC Distribution Unit 1B02735G01

ENI Spectrum 5kW RF Generator B-5002  0190-27361

Lam 4420  853-024403-100

Ecosys Novapure S447D C5-YY0-B5-D5-NN

AMAT IECP Main AC Cabinet 0190-01661

ENI Spectrum B-5002  0190-15320

TEL ACT 12 Adhesion Process Station 12"

Materials Research  A119124

MRC Eclipse  A120946

Hamamatsu LC5

Brooks Genus Left Vacuum Load Lock 001-9200-54

TEL ACT 12 WEE X-Theta

Thermo Electron Neslab DI Max DEI Water to Water Cooler

Yaskawa Dual Arm Transfer Robot XU-RCM7221

Yaskawa Transfer Robot Linear Track XU-ACL4141

TEL Tokyo Electron Fujikin Gas/Steam

Edwards iQDP80 Dry Vacuum Pump AMAT 3620-01386

Shimadzu Vacuum Turbopump TMP-3203LMEC-K1

AE Pinnacle  3152412-219B 0190-19198

Shimadzu Vacuum Turbopump TMP-3203LMC-K1

Brooks Genus  001-4700-12

Mitsubishi Sinchoon Turbopump FT-2300M-W1K1

AE Ovation  3150861-002D 0190-27049

AE Navigator 3155169-009C 0190-23122

EDWARDS Dry Vacuum Pump iQDP80 QMB500

AE Navigator RF Match 3155169-001 0190-16177

ENI Spectrum RF Generator B-5002  0190-15320

Osaka Vacuum Turbopump Set TH532ASAW 

TEL ACT 12 DC Power Supply TDK MSE181E

AE E'Wave Bipolar DC Power Supply 3152603-014D

ENI OEM-2000 

MKS ENI SPECTRUM 5kW RF Generator B-5002-01

AE Pinnacle 20KW DC Power Supply 3152412-129B